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Piezoelectric MEMS Workshops

We observe an increasing worldwide interest in piezoelectric thin film MEMS devices. Still great efforts are needed to establish reproducible processing routes, reliable integration, optimal poling procedures, standards in characterization methods, optimal device design, and reproducible operation conditions.

The first dedicated workshop on piezoelectric MEMS workshop was held in 2010 in Aachen. In 2011 we brought together again researchers and engineers from industry and academia to report and discuss on progress in in the field, and stimulate exchange on experience and possible cooperation. A combination of presentations and discussions gave experts and researchers the chance to boost this promising and quickly developing market. In addition, the workshops were a great opportunity for companies working in MEMS or using MEMS to learn about the state of the art in piezoMEMS based on ferroelectric and non-ferroelectric piezoelectric thin films.

Since then, the Piezoelectric MEMS workshop has been held at different other locations and has become a regular event.

Hosting institutions

  • 2010: AIXACCT, Aachen, Germany
  • 2011: EPFL, Lausanne Switzerland
  • 2013: PennState University, State College, PA (Washington, DC), USA
  • 2014: Kobe University, Kobe, Japan
  • 2016: CEA-LETI, Grenoble, France
  • 2018: Oregon State University & US Army Research Laboratory, USA